The Nano Servo Stage is a piezopositioner that enables position control of the nanometer accuracy using a piezoelectric actuator and capacitive sensor. The Nano Step Slider is high speed and long range piezopositioner. Up to 100 millimeter of motion in X and XY-axis with 10 nanometer resolution is possible Electronic hammer that applies inertial force generated when piezoelectric actuator is steeply extended Not exporting for the time being. Force sensor that can measurement of cutting and grinding force in precision machining and wear-out management in a tip of the blade. It is possible to apply the minute power measurement such as micro probe contact etc. Not exporting for the time being.

Nano Control offers nanometer range Nanopositioning and Piezo Positioning systems for high precision work in semiconductor, metrology, optical, and laser technology. Complete positioning systems are configured application specific in travel ranges from 6 to 500 microns and feature the ability to make moves in 6 to 100 micron ranges with better than 5nm repeatability. Advanced piezo drive technology and special algorithms permit extremely precise moves in X, Y, Z and Theta-axes. Unique elastic deformation guide technology achieves extremely true orthogonally and excellent linear trajectories. 2007 version New General Catalogue (190 pages) is now available for distribution. Click here for details>>

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