Japanese piezoelectric equipment manufacturer

 

 

Nanometer Positioning Technology

Piezoelectric actuator, Piezo element was used A special manufacturer of precision positioning stages / devices of nano orders

Analytical instruments / MEMS / semiconductor engineering / microfabrication / biotechnology / optical integration technology

Information

> 2018.09.28
  NewsWEB site renewal

> 2018.08.20
  NewsWe published catalog vol.6.

Standard linear stages
Standard linear stages

Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.

MORE

Products

  • Standard linear stages
    Standard linear stages

    Standard linear stages constitute a basic series among the piezo stage lineup, which ranges from single-axis types to integrated three-axes types with various strokes.

    MORE
  • Stages with an opening
    Stages with an opening

    Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.

    MORE
  • Rotary/tilting stages
    Rotary/tilting stages

    The rotation and angle can be adjusted with a piezo drive. Each stage excels in high-speed oscillation and angular resolution despite a slight angular displacement, and is suitable for applications such as minute-angle alignment for an optical device and precision face matching.

    MORE
  • For optical mirror alignment
    For optical mirror alignment

    This stage is designed for fine adjustment of the angle of optical mirrors. It excels in high-speed oscillation and high positioning reproducibility, and is optimal for applications such as laser beam scanning and precision mirror alignment.

    MORE
  • For objective lens focusing
    For objective lens focusing

    These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.

    MORE
  • A stage for ultraprecision processing machinery
    A stage for ultraprecision processing machinery

    This stage is intended to achieve nano-micro processing in precision cutting. It is capable of performing position control for tool cutting and the work (workpiece to be processed) at high speed and with high accuracy.

    MORE
  • A general-purpose type with a strain gauge
    A general-purpose type with a strain gauge

    This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.

    MORE
  • Simple actuator
    Simple actuator

    In this product, a piezoelectric element is incorporated into a compact guide mechanism so that the element can be easily used as an actuator. Since the product has tapped holes, it can be easily secured and removed, and with an elastic hinge guide, a highly linear motion can be obtained. It does not contain a displacement sensor.

    MORE
  • Impact actuator
    Impact actuator

    This product is an electronic hammer intended to move the workpiece (object to be moved) by applying a striking force to the workpiece by rapidly elongating a piezoelectric actuator. It can be applied to uses such as the fine position adjustment of a temporarily assembled part or rotation centering.

    MORE
  • Moisture-resistant / for special environments
    Moisture-resistant / for special environments

    These are piezo stages intended to cope with special environments by having high durability under high-temperature and high-humidity environments by adopting a “metal-sealed piezoelectric actuator.”

    MORE
  • Controllers
    Controllers

    These are controllers intended to drive and control piezo stages. The controller, in which a control circuit, a driver and a displacement sensor amplifier are integrated, is directly connected with a piezo stage to provide closed-loop control. High-accuracy positioning with no hysteresis or creeping is achieved.

    MORE
  • Piezo drivers
    Piezo drivers

    These are low-noise drivers designed to drive a piezo stage by applying a voltage. They can be each used as an external power supply in cases where the current is inadequate for an open-loop operation or with a driver contained in the controller.

    MORE
  • Piezo motor stage
    Piezo motor stage

    For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted.

    MORE
  • Ultrasonic motor stage
    Ultrasonic motor stage

    For the actuator of this stage, ultrasonic actuator SPPA (Super Precision Piezo Actuator) is adopted.

    MORE
  • Micro-force type
    Micro-force type

    Capable of detecting and measuring a minute force at a μN (mgf) level with high sensitivity.

    MORE
  • High-rigidity type
    High-rigidity type

    Capable of detecting and measuring a load of 100N (10kgf) or more with high resolution.

    MORE
  • Sensor amplifier
    Sensor amplifier

    A low-noise amplifier common to a “micro force sensor” and a “high-rigidity sensor”

    MORE

From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

Inquiry