Nanometer Positioning Technology
Piezoelectric actuator, Piezo element was used A special manufacturer of precision positioning stages / devices of nano orders
Analytical instruments / MEMS / semiconductor engineering / microfabrication / biotechnology / optical integration technology
EventWe exhibited at "OPIE '19".
EventWe exhibited at "JSAP Spring Meeting, 2019".
EventWe exhibited at "Laser Science Technology Fair."
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NewsWe published catalog vol.6.
Ultraprecise positioning stages, which provide up to 1nm resolution and high-speed response.
Precision Motor Stage
A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm.
Stages with an opening
Each stage in this lineup has an opening (penetration hole) in the center of the moving table. These stages are suitable for applications such as laser transmission, micro observation, in which the stage is used in combination with a microscope or an analyzer, and high-accuracy mapping measurement.MORE
The rotation and angle can be adjusted with a piezo drive. Each stage excels in high-speed oscillation and angular resolution despite a slight angular displacement, and is suitable for applications such as minute-angle alignment for an optical device and precision face matching.MORE
For optical mirror alignment
This stage is designed for fine adjustment of the angle of optical mirrors. It excels in high-speed oscillation and high positioning reproducibility, and is optimal for applications such as laser beam scanning and precision mirror alignment.MORE
For objective lens focusing
These are piezo stages exclusively designed for adjusting the focus of objective lenses. Being incorporated in a microscope, inspection/measurement devices or observation equipment, they can speed-up lens focusing and improve the accuracy.MORE
A stage for ultraprecision processing machinery
This stage is intended to achieve nano-micro processing in precision cutting. It is capable of performing position control for tool cutting and the work (workpiece to be processed) at high speed and with high accuracy.MORE
A general-purpose type with a strain gauge
This is a general-purpose piezo stage developed at a low cost by adopting a strain gauge type sensor as the built-in displacement sensor. Capable of performing highly reliable positioning with a 20nm displacement resolution and feedback control, this stage has an excellent high-speed response.MORE
In this product, a piezoelectric element is incorporated into a compact guide mechanism so that the element can be easily used as an actuator. Since the product has tapped holes, it can be easily secured and removed, and with an elastic hinge guide, a highly linear motion can be obtained. It does not contain a displacement sensor.MORE
This product is an electronic hammer intended to move the workpiece (object to be moved) by applying a striking force to the workpiece by rapidly elongating a piezoelectric actuator. It can be applied to uses such as the fine position adjustment of a temporarily assembled part or rotation centering.MORE
Moisture-resistant / for special environments
These are piezo stages intended to cope with special environments by having high durability under high-temperature and high-humidity environments by adopting a “metal-sealed piezoelectric actuator.”MORE
These are controllers intended to drive and control piezo stages. The controller, in which a control circuit, a driver and a displacement sensor amplifier are integrated, is directly connected with a piezo stage to provide closed-loop control. High-accuracy positioning with no hysteresis or creeping is achieved.MORE
These are low-noise drivers designed to drive a piezo stage by applying a voltage. They can be each used as an external power supply in cases where the current is inadequate for an open-loop operation or with a driver contained in the controller.MORE
Piezo motor stage
For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted.MORE
Ultrasonic motor stage
For the actuator of this stage, ultrasonic actuator SPPA (Super Precision Piezo Actuator) is adopted.MORE
Capable of detecting and measuring a minute force at a μN (mgf) level with high sensitivity.MORE
Capable of detecting and measuring a load of 100N (10kgf) or more with high resolution.MORE
A low-noise amplifier common to a “micro force sensor” and a “high-rigidity sensor”MORE