Japanese piezoelectric equipment manufacturer
Precision Motor Stage

Piezo motor stage

Precision Motor Stage

Piezo motor stage

A high-accuracy stage capable of positioning and controlling a stroke of several to tens of millimeters with a high resolution of 20 to 40 nm. For the actuator of this stage, PiezoMotor’s PiezoLEGS® actuator is adopted. With two types in the actuator thrust, 6 N and 20 N, offered, the stage maintains a holding force almost equal to the thrust even when it is static, and ensures stability in static state, and high positioning accuracy against disturbance. This stage is available in two models in body material, an aluminum model and a stainless steel model.

Features

  • Space-saving with a slim body
  • Generates less heat itself
  • A type with a vacuum environment, a non magnetic type
  • High positional repeatability with a built-in liner encoder

Application

  • High-accuracy positioning of an optical system
  • Laser alignment
  • Precision mapping measurement
  • X-ray/analysis and measuring equipment
  • Specimen stage for microscopes
  • Application in which the object is to be held static after position adjustment

The product is very effective in applications where fixed-point positioning is mainly required or applications where the object is held static as the product is turned off after positioning.

LS1L46 / LS1L60
X-axis stage

Model number Moving range
[mm]
Resolution
[nm]
Maximum travel speed
[mm/sec]
Withstand load
[kg]
Built-in optical linear scale Type Size
[mm]
LS1L46-08B-06 ±4 40 5 1 Manufactured by NANO CONTROL 46×46×18
LS1L60-08B-06 ±4 40 5 1 Manufactured by NANO CONTROL 60×80×24
LS1L60F-08B-06 ±4 40 5 1 Manufactured by NANO CONTROL 60×80×24
LS1L90
X-axis stage

Model number Moving range
[mm]
Resolution
[nm]
Maximum travel speed
[mm/sec]
Withstand load
[kg]
Built-in optical linear scale Type Size
[mm]
LS1L90-16A-06 ±8 20 5 2 Manufactured by RENISHAW 90×110×26
LS1L90-16A-20 ±8 20 5 2 Manufactured by RENISHAW 90×110×26
LS1L90F-16A-06 ±8 20 5 2 Manufactured by RENISHAW 90×110×26
LS1L90F-16A-20 ±8 20 5 2 Manufactured by RENISHAW 90×110×26
LS1L90-16B-06 ±8 40 5 2 Manufactured by NANO CONTROL 90×110×26
LS1L90-16B-20 ±8 40 5 2 Manufactured by NANO CONTROL 90×110×26
LS1L90F-16B-06 ±8 40 5 2 Manufactured by NANO CONTROL 90×110×26
LS1L90F-16B-20 ±8 40 5 2 Manufactured by NANO CONTROL 90×110×26
LS1L120
X-axis stage

Model number Moving range
[mm]
Resolution
[nm]
Maximum travel speed
[mm/sec]
Withstand load
[kg]
Built-in optical linear scale Type Size
[mm]
LS1L120-25A-06 ±12.5 20 5 3 Manufactured by RENISHAW 120×140×26
LS1L120-25A-20 ±12.5 20 5 3 Manufactured by RENISHAW 120×140×26
LS1L120F-25A-06 ±12.5 20 5 3 Manufactured by RENISHAW 120×140×26
LS1L120F-25A-20 ±12.5 20 5 3 Manufactured by RENISHAW 120×140×26
LS1L120-25B-06 ±12.5 40 5 3 Manufactured by NANO CONTROL 120×140×26
LS1L120-25B-20 ±12.5 40 5 3 Manufactured by NANO CONTROL 120×140×26
LS1L120F-25B-06 ±12.5 40 5 3 Manufactured by NANO CONTROL 120×140×26
LS1L120F-25B-20 ±12.5 40 5 3 Manufactured by NANO CONTROL 120×140×26
LS2K180
XY-axes stage with an opening

Model number Moving range
[mm]
Resolution
[nm]
Maximum travel speed
[mm/sec]
Withstand load
[kg]
Built-in optical linear scale Type Size
[mm]
LS2K180-16B-06 (X)±8, (Y)±8 (X,Y) 40 5 2 Manufactured by NANO CONTROL 180×230×36
Controller for Piezo motor stage

This product is a controller intended to drive and control an LS-type piezo motor stage.
In the controller, a control circuit and a driver are structurally integrated. If a piezo motor stage is connected to the controller, it can perform closed control using an optical linear encoder with an ABZ-phase output.
Based on a controller for two-axis stages and a controller for four-axis stages, controllers for controlling one to four axes are offered.
The user can easily operate the controller by transmitting a control command from the computer via a LAN or an RS485 interface. The interface can be changed to an RS232C interface.

Features
  • It contains a control board, a driver board and a linear sensor interpolator. Being chain-connected via RS485 inside,the controller also supports multi-axis application (depending on the linear sensor).
  • Once the controller for controlling one, two, three or four axes is connected to the corresponding stage, it can immediately perform high-resolution positioning control.
  • The drive control is achieved with a linear sensor having a resolution of 10 nm and a driver having a drive resolution of 1 nm or below.
  • Since the drive resolution is 1 nm or below, the controller can also adapt to more accurate linear sensor other than the standard sensor.
  • Since the internal control board is chain-connected via RS485, the controller also supports multi-axis application (127 axes at a maximum).
Model number Number of controlled axes Optical linear sensor type * Control interface External dimensions
[mm]
LC421A 1 Manufactured by (R) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC421B 1 Manufactured by (N) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC422A 2 Manufactured by (R) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC422B 2 Manufactured by (N) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC443A 3 Manufactured by (R) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC443B 3 Manufactured by (N) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC444A 4 Manufactured by (R) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)
LC444B 4 Manufactured by (N) LAN,RS485(Standard) USB , RS232C(Optional) W210×D228×H60(Excludes the projection)

*(R):Renishaw/(N):Nano Control

From inspection and measurement to manufacturing equipment

We are ready to respond to requests for precision positioning of nanometers to submicrons required for various applications.

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